• EPX Vacuum Dry Pumps

    The EPX Series supports clean and light duty semiconductor processing applications such as ash/strip and implant end station applications.

    The EPX Series offers on-tool pumping in a very light small package and delivering exceptionally clean vacuum.. Using a unique, patented, single-shaft regenerative Holweck® stage mechanism, EPX pumps are capable of evacuating from atmosphere to ultimate pressures of Torr.

    Offering enhanced performance in a modular package, EPX pumps can be integrated onto a process tool or mounted remotely. Integrated MicroTIM electronics also provide simple communication connections to the process tool.



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  • Applications
    Key Features & Benefits
    Pump Ranges
  • When F.D. Edwards began manufacturing vacuum equipment in 1939, he made a commitment to technical innovation that remains solidly at the heart of what we do today.

    Learn More about Our History