• Integrated Systems & Sub-Fab Solutions

    Our completely integrated and flexible vacuum and abatement solutions will ensure a safe operation in hazardous processes, and reduce overall your operating costs.

    We are dedicated to providing the optimum solutions for semiconductor processes, and our expertise in sub-fab solutions is unrivaled. Our global applications expertise ensures each system provides the optimum hardware and software, best vacuum and exhaust management practices, suitable ancillary equipment, delivering the ideal installation with the most reliable operation.

    All of our integrated systems have been designed based on global experience. We are leaders in vacuum and abatement, so we know what works. We constantly innovate and improve what we do because you demand excellence from Edwards.

       

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  • Our History

    When F.D. Edwards began manufacturing vacuum equipment in 1939, he made a commitment to technical innovation that remains solidly at the heart of what we do today.

    Learn More about Our History

  • Product Documentation

    Learn more about our Integrated Solutions product offerings...

    Integrated & Exhaust Management Solutions Brochure

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    Edwards offers the FabWorks Intelligent Monitoring System, a complete condition monitoring and analysis system for vacuum and exhaust management equipment.

    Learn More about FabWorks

  • Presentation: Green Mode

  • Video: Green Mode