The iXH family of dry pump products is
an evolution of Edwards’ market-leading iH products and sets new standards for
harsh process capability delivering low cost of ownership through process
reliability in many of the worlds 300mm semiconductor and flat panel fabs.
The perfect range of high capacity dry pumps and boosters that can meet the ever increasing gas flow requirements encountered in the FPD, solar, semiconductor and LED manufacturing industries. A well as high peak pumping speed these pumps are equipped with features to
ensure maximum reliability on harsh processes.
With a modular design, iXH pumps meet today’s process requirements and have road-mapped responses to emerging application challenges in leading edge fabs.
Target applications for Semiconductor include:
Target applications for FPD include:
Discover what makes us different...Corporate Responsibility ReportEdwards ISO/OHSAS CertificatesEdwards Leadership TeamVacuum Safety Booklet
When F.D. Edwards began manufacturing vacuum equipment in 1939, he made a commitment to technical innovation that remains solidly at the heart of what we do today.
Learn More about Our History
Learn more about the iXH product line...
iXH Dry Pumps Product BrochureiXH Dry Pumps HF Product BrochureBGV Gate Valve w/LOTO BrochureBGV Gate Valve Manual/Pneumatic Brochure
Edwards offers the FabWorks Intelligent Monitoring System, a complete condition monitoring and analysis system for vacuum and exhaust management equipment.
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